Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation Y Ding, Y Zhang, YM Ren, G Orkoulas, PD Christofides Chemical Engineering Research and Design 151, 131-145, 2019 | 51 | 2019 |
Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design Y Zhang, Y Ding, PD Christofides Chemical Engineering Research and Design 147, 529-544, 2019 | 43 | 2019 |
Microscopic modeling and optimal operation of thermal atomic layer deposition Y Ding, Y Zhang, K Kim, A Tran, Z Wu, PD Christofides Chemical Engineering Research and Design 145, 159-172, 2019 | 30 | 2019 |
Operational trend prediction and classification for chemical processes: A novel convolutional neural network method based on symbolic hierarchical clustering Y Wang, Y Zhang, Z Wu, H Li, PD Christofides Chemical Engineering Science 225, 115796, 2020 | 23 | 2020 |
Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition Y Zhang, Y Ding, PD Christofides Computers & Chemical Engineering 142, 107066, 2020 | 22 | 2020 |
Computational fluid dynamics-based in-situ sensor analytics of direct metal laser solidification process using machine learning YM Ren, Y Zhang, Y Ding, Y Wang, PD Christofides Computers & Chemical Engineering 143, 107069, 2020 | 21 | 2020 |
Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition Y Ding, Y Zhang, G Orkoulas, PD Christofides Chemical Engineering Research and Design 159, 439-454, 2020 | 19 | 2020 |
Integrating feedback control and run-to-run control in multi-wafer thermal atomic layer deposition of thin films Y Zhang, Y Ding, PD Christofides Processes 8 (1), 18, 2019 | 19 | 2019 |
Adapted Receptive Field Temporal Convolutional Networks with Bar-Shaped Structures Tailored to Industrial Process Operation Models Y Wang, Y Zhang, H Li Industrial & Engineering Chemistry Research 59 (13), 5482-5490, 2020 | 10 | 2020 |
Run-to-run control of thermal atomic layer deposition Y Zhang, Y Ding, Z Wu, PD Christofides 2020 28th Mediterranean Conference on Control and Automation (MED), 1080-1086, 2020 | 3 | 2020 |