The formation mechanism of 3D porous anodized aluminum oxide templates from an aluminum film with copper impurities J Vanpaemel, AM Abd-Elnaiem, S De Gendt, PM Vereecken The Journal of Physical Chemistry C 119 (4), 2105-2112, 2015 | 39 | 2015 |
EUV lithography imaging using novel pellicle membranes I Pollentier, J Vanpaemel, JU Lee, C Adelmann, H Zahedmanesh, ... Extreme Ultraviolet (EUV) Lithography VII 9776, 587-600, 2016 | 29 | 2016 |
Electrochemical deposition of subnanometer Ni films on TiN J Vanpaemel, M Sugiura, D Cuypers, MH van der Veen, S De Gendt, ... Langmuir 30 (8), 2047-2053, 2014 | 26 | 2014 |
Introducing the EUV CNT pellicle JU Lee, J Vanpaemel, I Pollentier, C Adelmann, H Zahedmanesh, ... Photomask Technology 2016 9985, 26-33, 2016 | 23 | 2016 |
Growth and integration challenges for carbon nanotube interconnects J Vanpaemel, M Sugiura, Y Barbarin, S De Gendt, Z Tökei, PM Vereecken, ... Microelectronic engineering 120, 188-193, 2014 | 23 | 2014 |
Properties and performance of EUVL pellicle membranes EE Gallagher, J Vanpaemel, I Pollentier, H Zahedmanesh, C Adelmann, ... Photomask Technology 2015 9635, 206-213, 2015 | 22 | 2015 |
Enhanced nucleation of Ni nanoparticles on TiN through H3BO3-mediated growth inhibition J Vanpaemel, MH van der Veen, S De Gendt, PM Vereecken Electrochimica Acta 109, 411-418, 2013 | 19 | 2013 |
Dual role of hydrogen in low temperature plasma enhanced carbon nanotube growth J Vanpaemel, MH van der Veen, DJ Cott, M Sugiura, I Asselberghs, ... The Journal of Physical Chemistry C 119 (32), 18293-18302, 2015 | 14 | 2015 |
Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization MH van der Veen, B Vereecke, M Sugiura, Y Kashiwagi, X Ke, DJ Cott, ... 2012 IEEE International Interconnect Technology Conference, 1-3, 2012 | 8 | 2012 |
200 mm Ge wafer production for oxide-free Si-Ge direct wafer bonding B Rebhan, J Vanpaemel, V Dragoi ECS Transactions 98 (4), 87, 2020 | 4 | 2020 |
Optical testing of EUV pellicle materials I Pollentier, J Vanpaemel, H Zahedmanesh, C Adelmann, C Huyghebaert, ... | 4 | 2015 |
Effect of boric acid on the nucleation and growth of Ni nanoparticles for CNT growth J Vanpaemel, M Van der Veen, C Huyghebaert, S De Gendt, ... ECS Transactions 50 (20), 29, 2013 | 2 | 2013 |
Interconnected Ni Nanowire scaffolds for fast-charging 3D thin-film Lithium-Ion batteries SP Zankowski, J Vanpaemel, PM Vereecken Electrochemical Society Meeting Abstracts 230, 459-459, 2016 | 1 | 2016 |
Acoustic meta-materials in MEMS bar resonators X Rottenberg, R Jansen, Y Zhang, A Coosemans, G Delcour, K Herdewyn, ... | 1 | 2010 |
Growth-inhibited nucleation enhancement: from high density nanoparticle deposits to nanometer thin continuous films PM Vereecken, J Vanpaemel, M Nagar, K Strubbe, A Radisic Electrochemical Society Meeting Abstracts 230, 1587-1587, 2016 | | 2016 |
The development of an EUVL pellicle comprising carbon nanomaterials J Vanpaemel, JU Lee, C Krishnaraj, I Pollentier, C Huyghebaert, ... | | 2016 |
The formation mechanism of 3D anodized aluminum oxide templates from an aluminum film with copper impurities J Vanpaemel, A Abd-Elnaiem, S De Gendt, P Vereecken | | 2015 |
Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnects J Vanpaemel | | 2014 |
From High Density Nanoparticle Deposits to Nanometer Thin Continuous Films By Growth-Inhibited Nucleation Enhancement PM Vereecken, J Vanpaemel, M Nagar, A Radisic Electrochemical Society Meeting Abstracts 226, 912-912, 2014 | | 2014 |
From high-density nanoparticle deposits to nanometer thin continuous by growth inhibited nucleation enhancement P Vereecken, J Vanpaemel, M Nagar, A Radisic | | 2014 |